Grandly Automation Ltd
Products Category
Honeywell
Contact Us
Tel: +86-755-23490951
Fax: +86-755-23490951
Mobile: +86-13425158853
E-mail: [email protected]
Add: RM806, Zhantao Tech Building, Minzhi Rd No.1083, Bao'an District, Shenzhen, China
Skype: grandlyauto
QQ:
2658392408
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Product name : 3156024-131 - AE
Product No. : 3156024-131 - AE
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| Details: |
Grandly Automation Ltd
Attn: Sofina
Email: [email protected]
Manufacture:AE
MODEL:
1.stepper controller 0100-20173
2.Oregon Micro Systems 0190-09939
3.Analog I/O Board 0100-20100
4.System Electronics Interface 0100-20001
5.RF Match 0010-20524
6.13.56MHZ 1000W 0190-70099
7.CX-600AS 0190-21755
8.PDX 900RFG 3156024-110C 0190-75075
9.HFV-8000 16.5MHZ 0190-13203
10.LF10A
11.RF Match Bias 0010-13627
12.RF Match 0010-13622
ENI RF GENERATOR ENI NOVA50A-13DF3H0-003/10 (P/N 0190-15316)
OEM28B, NOVA50, AX2115, GMW25
MKS 28B Gen 3qty(any oem-28b)
0190-70100 LF10A 3qty(or LF10)
0190-25116 nova-50a 2qty(any nova-50a)
any ghw25 / nova25
ax2115
cps1001s
0010-13627
0010-33724
MKS 28B RF GENERATOR.
3156115-003/053/203/253
ENI OEM 28B-02
OEM P/N: 0190-01264
Qty: 4 units
1.ENI/MKS GHW25A-13DF3N0-001
2.ENI/MKS NOVA-50A-04
1.ENI/MKS GHW25A-13DF3N0-001
2.ENI/MKS NOVA-50A-04
AE Mercury 3KW Automatch
3150274-008
27-255873-00
Qty= 3 units
ENI Generator, PN NOVA-50A-10
1 unit
eni nova 50 gen.
3156115-203, RF Generator
Qty: 2pcs
0195-01528 AS00373-02
MKS D-NET BOARD
Qty 4ea
ENI OEM-25B-01
GHW-50
3152412-149
Qty: 2pcs
High frequency generator RFG 1250 HALO (2.4 kW, 13.56MHz) – 2 pcs.
p/n 660-024637-028
s/n 247212 F/R D
Manufacturer – Advanced Energy.
27-032269-00 OEM-28B-04 Generator,HF,2.75KW,Interlocked
27-130531-00
Mercury 3013, MB (AE 3150274-003)
27-255873-00
Mercury 3013 Match (AE 3150274-008)
MKS NOVA-50
ENI NOVA-50
P/N：0190-48716
Centura-HDP Side GEN
P/N:0190-25116
P/N:0190-48716
NOVA-50A-04
0010-18129 TOP LOCAL MATCH ASSY, HDP-CVD
0010-15487 TOP LOCAL MATCH, ULTIMA TE HDP CVD 200MM
0010-18130 SIDE LOCAL MATCH ASSY, ULTIMA HDPCVD
0010-13524 SIDE LOCAL MATCH ASSY, BALANCED SIDE COIL, ULTIMA PLUS
0010-15488 SIDE MATCH ASSY,TE
0190-11225 RF MATCH/E-CHUCK POWER SUPPLY ASSY, 200M
0190-11225 RF MATCH/E-CHUCK POWER SUPPLY ASSY, 200M
---> AE PN is 3155031-036 or -039
P/N: 27-255873-00
AE Mercury 3013 Match
AE P/N: 3150274-008
Q’ty : 3 ea
M/N 3152410-100D (S/N. 318734).
M/N 3152410-100D (S/N. 330159)
qty 3 of the MKS 28B RF Generator.
1. RFPP LF10A, MPN 3150010-001 P/N: 0190-70100- 3 qty working condition
2. MDX-L12M-650 -5 qty working condition
Power Generator 3157600-004 PEII 10kW (200~208V)
or
Power Generator 3157600-108 PEII 10kW (400V)
Maker: Advanced Energy
QTY: 1 PCS
ENI NOVA-50A GENERATOR 0190-25116
1) Manufacturer: ENI
2) Description(Model): NOVA-50A-02 (3.2MHz) Generator
3) Q'ty: 2ea
OEM 28B RF generator
NOVA RF Generator (NOVA 50A-04)
NOVA-50A-10 ENI GENERATOR 2MHZ 208V 5KW*1pc
Pinnacle/Advanced Energy power supplies. Part number 3152417-216N
Brand
MODEL
M/N
P/N
TYPE
AMAT
P5000 CVD MATCH
0010-09750
0020-09357
P5000 CVD MATCH
OK
AMAT
P5000 ETCH MATCH
0010-09416 W
0010-18130
P5000 ETCH MATCH
OK
AMAT
P5000 PVD MATCH
0010-20524
0010-13627
P5000 PVD MATCH
OK
AMAT
BIAS RF MATCH
0010-12194
OK
AMAT
HE RF BIAS MATCH
0010-33724
OK
AMAT
P5000 DC PSU Units
15V 24V 5V 12V DC PSU
OK
ENI
NOVA-50A-10
AM200-HDPECVD
0190-15316 AMAT
1.8-2.17M 5300W RF GENERATOR
OK
ENI
NOVA-50A-04
AM200-HDPECVD
0190-25116 AMAT
2M 5.3KW RF GENERATOR
OK
ENI
NOVA-50A-04
AM200-HDPECVD
0190-19511 AMAT
1.8-2.17M 5300W RF GENERATOR
OK
ENI
GHW50A-13DF3H0-003
AM200-HDPECVD
0190-25115 AMAT
13.56M 5KW RF GENS
OK
ENI
GHW55A-13DF4L0-001
TEL
3D80-000075-15
13.56M 5.5KW RF GENERATOR
OK
ENI
GHW55A-13DF4L0-002
TEL
3D80-000835-V1
13.56M 5.5KW RF GENERATOR
OK
ENI
GHW50A-13DF3L0-006
NOVELLUS
27-370088-00
13.56M 5.0KW RF GENERATOR
OK
ENI
GHW50A-13DF3L0-006
LAM
660-178383-001
13.56M 5.0KW RF GENERATOR
OK
ENI
GHW50A-13DF3H0-004
AMAT-EMAX
0190-08678
13.56M 5.0KW RF GENERATOR
OK
ENI
GHW85A-13DF2L0-001
NOVELLUS
27-105447-00
13.56M 8.5KW RF GENERATOR
OK
MKS
SPECTRUM B-5002-01
AMAT
0190-15320W
2M 5KW RF GENERATOR
OK
ENI
GHW12Z-13DF2N0-001
AMAT
0190-13306
13.56M 1.25KW 480V 3P AMAT
OK
ENI
GHW25A-13DF3HO-001
TEL PVD
1D80-091111-12
13.56M 2.5KW RF GENERATOR
OK
MKS
SPECTRUM B-11002-01
11KW 2M
0190-15449
300MM AMAT HDPE-CVD ULTIMA RF
OK
MKS
SPECTRUM B-11002-01
11KW 2M
0190-22201
300MM AMAT HDPE-CVD ULTIMA RF
OK
MKS
SPECTRUM B-10513-00
10.5KW 13.56M
1090-17877
300MM AMAT HDPE-CVD ULTIMA RF
OK
ENI
ACG-6B-02
LAM
0920-01117
600W,RF GENS ETCH
OK
ENI
ACG-3B-01
300W,RF GENS
OK
ENI
OEM-25B-01
TEL
27-050151-00
NOVELLUS RF GENERATOR
OK
ENI
GHW50A-13DF3H0-000
AMAT
5000W,13.56M NOVELLES CVD
OK
MKS/ENI
SPECTRUM B-3013-08
1005541
3KW,13.56MHZ,RF
OK
ENI
MWD-55LD-04
OXT112
F8，OXT112 CVD
OK
ENI
MWD-25LD-02
TEL DRM
3D80-000076-V4
2.5KW RF AUTO MATCH
OK
ENI
MWD-25LD-06
TEL DRM
2.5KW RF AUTO MATCH
OK
MKS/ENI
B-5002-03
F12
0190-15320 W
F12,LAM CVD
OK
MKS/ENI
SUREPOWER QL6513A-12068
27-438022-00
6500W,13.56M,
OK
ENI
GMW25A-2D0F3H0-003
AMAT
0190-16511 0190-09834
RF 2MHZ LAM ETCH
OK
ENI
GMW25A-2D0F3H0-001
AMAT 0190-09833
0190-21830
2M 2.5KW RF GENERATOR
OK
ENI
GW2502MA-B1C001-L3
LAM
660-110685-012
RF GEN,2MHZ,2.5KW,CE
OK
ENI
QUANTA-10D-01
AMAT
0190-05624
DUAL 900W LF 350KHZ RF GENS
OK
ENI
DPGD-10-CE
AMAT
0190-36343
MF GENERATOR,350KHZ 1250W
OK
ENI
NOVA-25A-01
AMAT HART
0190-00060
RF GENERATOR,1.8-2.17MHZ 2500W
OK
ENI
OEM-12B3-02
1P 208v 1250W
0190-76028
200MM ETCH PVD
ENI
OEM-12B3-08
3P 208v 1250W
0920-01061
200MM ETCH
OK
ENI
GEW3040MA-F2H00-01
40.68MHZ 3KW
1D80-003506-14
200MM 3000W 40.68MHZ ETCH
OK
ENI
OEM-12B-02(07)
1P 208v 1250W
0190-76048
200MM ETCH
OK
ENI
OEM-28B-02
AMAT
0190-01264
AMAT 13.56MHZ 2800W RF GENS
OK
ENI
OEM-28B-04
NOVELLUS
27-850151-00
NOVELLUS 13.56MHZ 2750W RF GENS
OK
MKS/ASTEX
ASTEX AX2115
1500W.2.45GHZ，microware gens
OK
MKS
DCG200Z
0190-08033
DC24M-Z041300110A
DC POWER 20KW AMAT
OK
MKS
SPECTRUM B-5002-03
CVD 300MM 5KW 1.8-2.17M
OK
ENI/LAM
DOFBC2-084(2MHZ)
300MM ETCH
660-002295-002
LAM ETCH DUAL FREQ OB2-2M
OK
ENI/LAM
DOFBC2-083(27MHZ)
300MM ETCH
660-002294-R002
LAM ETCH DUAL FREQ OB2-27M
OK
ENI/LAM
DOFBC2-075(2M,27M MATCH)
300MM ETCH
LAM ETCH DUAL FREQ OB2-RF MATCH
OK
ENI
OEM-2000-01M1
TEL
TEL 13.56MZ 2000W
OK
ENI/LAM
000-1134-076(OB1-2MHZ)
200MM ETCH
660-099877-402
2M 2.5KW RF GENERATOR
OK
ENI/LAM
000-1134-077(OB1-27MHZ)
200MM ETCH
660-099877-302
27.12M 1.8KW RF GENS
OK
ENI/LAM
000-1134-075(2MHZ+27MHZ DUAL)
200MM ETCH
660-
2MHZ+27MHZ DUAL MATCH
OK
LAM RESEARCH
ENCL ONE-BOX FRU DFC2300
660-099877-R201
LAM DFC2300 ETCH ASSEMBLY
OK
MKS/ASTeX
FI20160-3
660-011161-702
Microware SmartPower
ok
AE
PDX-1250
3156024-114
LF 350KHZ RF GENS
OK
AE
PDX-900-2V
3156024-133
0190-10028
25P I/O.LF RF GENS
OK
AE
PDX-900-2V
3156024-131
0190-08677-002
25P I/O.LF RF GENS
OK
AE
PDX-1400
3156024-141C
27-028379-00 F/R/C
MF GENERATOR,380KHZ 1400W
√
AE
PDX-900-2V
3156024-110C
0190-75075
MF GENERATOR,KHZ 900W
OK
AE
MDX-L12M
3152343-100B
0190-70072
DC POWER 12KW
OK
AE
MDX-L12
3152272-000
0190-70086
DC POWER 12KW
OK
AE
MDX-L12M-650
3152344-101B
0190-76192
DC POWER 12KW
OK
AE
MDX-L6
3152317-000A
0190-76006
DC POWER 6KW
OK
AE
MDX-L6 HALO
3152343-000A
DC POWER 6KW
OK
AE
MDX-L6M-650
3152313-001B
0190-76192
DC POWER 12KW
OK
AE
APEX-5513
3156115-651
R27-366881-00
5500W,13.56M RF GENS
OK
AE
APEX-5513
3156115-207
27-346753-00
5500W,13.56M RF GENS
OK
AE
APEX10013 10KW/13
3156117-006 A
04-276624-00
RF 13.56M 10KW
OK
AE
APEX3013
3156113-008 C
0920-00085
3KW 13.56M RF GENS
OK
AE
Pinnacle plus+ 10kw
3152536-358 A
3P 480V,PFP,HH.P16，M/S
40KHZ 10KW PLUS DC POWER
OK
AE
Pinnacle 6kw
3152411-129
0190-34931-000
6KW 480V 400-1000V PFP YJ UHF
OK
AE
pinnacle 20kw
3152412-243
0190-23671-001
DC POWER 20KW
OK
AE
Pinnacle 20kw
3152411-300 A
0190-34647-000
20KW 208V PFP HJ RING LUG
OK
AE
pinnacle 20kw
3152412-233 D
0190-25724-001
20KW 480V PFP 400-1000V
OK
AE
RF MATCH
3156115-704
1021925 F/R A
NOVELLUS RF MATCH
OK
AE
RF MATCH AZX90
3155031-004
AMAT AME 8300
RF AUTO MATCH AMAT Bias match
OK
AE
RF MATCH AZX90
3155031-043
0190-30486-000
RF AUTO MATCH AMAT CVD
OK
AE
RF MATCH AZX63
3155031-000 G
RF AUTO MATCH AMAT CVD
OK
AE
RF MATCH 3KW
3155077-001B
RF FIXED MATCH MFA
RF MATCH 20-j28 CVD
OK
AE
RF MATCH 3KW
3155094-003
RF FIXED MATCH MFA
RFG2K-2V 7-j15 RF MATCH
OK
AE
RF MATCH
3155132-008 A
0190-34238-003
RF AUTO MATCH
ok
AE
RF MATCH
3155031-014E
RF MATCH PVD
ok
AE
NAVIGATOR-1013 RF MATCH
3155126-011 C
RF MATCH PVD
ok
AE
RFG3001
3155089-004(5)
RF GENERATOR 3KW 13.56MHZ
OK
AE
RFG3001
3155089-008 B
RF GENERATOR 3KW 13.56MHZ
OK
AE
RFG5500
3155051-015
27-115617-00
15P I/O 5KW 13.56M HF RF GENS
OK
AE
RFG3000
3155038-005B
27-034212-00 F/R D
15P I/O 2.75KW 13.56M HF RF GENS
OK
AE
RFG3000
3155038-004A
25P I/O 3KW 13.56M HF RF GENS
OK
AE
RFG-1250 HALO
3155027-026C
660-024637-026
25P I/O 960W RF
OK
AE
RFG-1250 HALO
3155027-005C
660-024637-013
YERROW
OK
AE
RFG-1250
3155027-008J
660-024637-008
25P I/O
OK
AE
RFG-1251
3155107-001C
3*208V 1250W 13.56M RF
OK
AE
RFG-2000-2V
3155053-007A
2000W.13.56M RF
OK
AE
RFDS-2000-2V
3155059-002A
660-024637-016
2000W.13.56M RF
OK
AE
RFDS-1250
3155059-026 H
660-024637-026
13.56M 900W RF GENS
OK
AE
RFX-600A
3155082-331C
13.56M 600W RF GENS FANS COOL
OK
AE
HFV-8000
3155083-130 C
0190-22080-B
2M 8KW RF GENERATOR
OK
AE
HFV-8000
3155083-109
0190-01873
2M 5KW RF GENERATOR
OK
AE
OVATION 2060
3150852-005-A-
2KW 60MHZ RF GENS
OK
AE
OVATION 35162
3150861-002 D
0190-27049-003
162MHZ 3.KW RF GENS
OK
AE RFPP
LF-10A
3150010-011H
7520426011
50-460KHZ 1KW LF GENERATOR
OK
AE
Dressler VM1000A
13.56M 1000W RF MATCH
OK
AE
CESAR 1310
61300050
230V 1P,1000W,13.56M
RF 13.56MHZ 1000W
OK
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